JPH02127801U - - Google Patents
Info
- Publication number
- JPH02127801U JPH02127801U JP3623389U JP3623389U JPH02127801U JP H02127801 U JPH02127801 U JP H02127801U JP 3623389 U JP3623389 U JP 3623389U JP 3623389 U JP3623389 U JP 3623389U JP H02127801 U JPH02127801 U JP H02127801U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- vane
- rotary actuator
- shrinkage fit
- fitting groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000003672 processing method Methods 0.000 description 1
Landscapes
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3623389U JPH0722483Y2 (ja) | 1989-03-28 | 1989-03-28 | ロータリアクチエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3623389U JPH0722483Y2 (ja) | 1989-03-28 | 1989-03-28 | ロータリアクチエータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02127801U true JPH02127801U (en]) | 1990-10-22 |
| JPH0722483Y2 JPH0722483Y2 (ja) | 1995-05-24 |
Family
ID=31542288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3623389U Expired - Lifetime JPH0722483Y2 (ja) | 1989-03-28 | 1989-03-28 | ロータリアクチエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722483Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7515253B2 (en) | 2005-01-12 | 2009-04-07 | Kla-Tencor Technologies Corporation | System for measuring a sample with a layer containing a periodic diffracting structure |
-
1989
- 1989-03-28 JP JP3623389U patent/JPH0722483Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0722483Y2 (ja) | 1995-05-24 |